Development of novel segmented-plate linearly tunable MEMS capacitors

In this paper, novel MEMS capacitors with flexible moving electrodes and high linearity and tunability are presented. The moving plate is divided into small and rigid segments connected to one another by connecting beams at their end nodes. Under each node there is a rigid step which selectively limits the vertical displacement of the node. A lumped model is developed to analytically solve the governing equations of coupled structural-electrostatic physics with mechanical contact. Using the analytical solver, an optimization program finds the best set of step heights that provides the highest linearity. Analytical and finite element analyses of two capacitors with three-segmentedand six-segmented-plate confirm that the segmentation technique considerably improves the linearity while the tunability remains as high as that of a conventional parallel-plate capacitor. Moreover, since the new designs require customized fabrication processes, to demonstrate the applicability of the proposed technique for standard processes, a modified capacitor with flexible steps designed for PolyMUMPs is introduced. Dimensional optimization of the modified design results in a combination of high linearity and tunability. Constraining the displacement of the moving plate can be extended to more complex geometries to obtain smooth and highly linear responses. (Some figures in this article are in colour only in the electronic version)